Michael A. Lieberman

Michael A. Lieberman
University of California, Berkeley


"For his ground-breaking and insightful, experimental and theoretical work on the physics of electrical discharges and their applications to plasma processing."


Professor Michael A. Lieberman received his B.S. and M.S. degrees from the Massachusetts Institute of Technology in 1962 and his Ph.D. degree from Massachusetts Institute of Technology in 1966. He joined the Department of Electrical Engineering and Computer Sciences (EECS) at Berkeley in 1966. In 1971, he received the Distinguished Teaching Award of the Berkeley campus. He was a Guggenheim Fellow during 1972-3. He is a Fellow of the American Physical Society (APS), the American Association for the Advancement of Science (AAAS), the Institute of Electrical and Electronic Engineers (IEEE), the American Vacuum Society, and the Institute of Physics (Great Britain). He received the IEEE Plasma Science and Applications Award in 1995, and the Von Engel Prize of the International Union of Pure and Applied Physics in 2005.
Professor Lieberman's research interests are plasma processing of materials, plasma modeling and diagnostics. He has also collaborated with Prof. A.J. Lichtenberg on research in nonlinear dynamics. His monograph, co-authored with A.J. Lichtenberg, Regular and Stochastic Motion, was published by Springer-Verlag in 1983. A second edition, Regular and Chaotic Dynamics, was published in 1991. His latest book, also co-authored with A.J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, was published by John Wiley and Sons in 1994. An expanded second edition was published in 2005.

Selection Committee:

Rainer Johnsen (Chair), Steve Buckman (12/05), J.W. McConkey (2004 winner)(12/05), Margaret Murnane (V. Chair)(12/07),Linda Young (12/07)